Atomic Data for Fusion. Volume 3: Particle Interactions with Surfaces (E. W. Thomas ed.), ORNL-6088 (ORNL-6086 V3) (1985).

A. Sputtering

• page A-1 Section Title
• page A-2 Introductory Notes
• page A-3
• page A-4
• page A-5 This page left blank intentionally
• page A-6 Sputtering of C by H⁺, D⁺ and ⁴He⁺
• page A-7
• page A-8 Sputtering of Al by H⁺, D⁺ and ⁴He⁺
• page A-9
• page A-10 Sputtering of Ti by H⁺, D⁺ and ⁴He⁺
• page A-11
• page A-12 Sputtering of Mo by H⁺, D⁺ and ⁴He⁺
• page A-13
• page A-14 Sputtering of Stainless Steel by H⁺, D⁺ and ⁴He⁺
• page A-15
• page A-16 Sputtering of TiC by H⁺, D⁺ and ⁴He⁺
• page A-17
• page A-18 Self-Sputtering Coefficients for Al, Cr, Ni, Cu, and Zn
• page A-19
• page A-20 Self-Sputtering Coefficients for Ag, Au, Mo, Nb, and W
• page A-21
• page A-22 Example of Energy Distribution of Sputtered Atoms
• page A-23
• page A-24 Example of Chemical Sputtering
• page A-25
• page A-26 Sputtering Coefficient of Ni and W by O⁺
• page A-27
• page A-28 Neutron Sputtering of V, Co, Nb, and Au

Last Modified: December 28, 1999

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